| 棣栭〉 | 璧勮涓績(jī) | 鍖栧伐鍟嗚錘 | 縐戝鐮旂┒ | 浜т笟鍙戝睍 | 浜烘墠浜ゆ祦 | 浼?xì)灞曚俊鎭?/a> | 瀹炵敤緗戝潃 | 緹よ嫳鑱氶 | 瀛﹁呬粙緇?/a> | 浼?xì)鍛樹(shù)腑蹇?jī) | 璁哄潧 | ||
 | 濉戞枡 | 姍¤兌 | 綰ょ淮 | 娑傛枡涓庢補(bǔ)澧?/a> | 鑳剁矘鍓?/a> | 澶嶅悎鏉愭枡 | 鐭沖寲 | 鍖栧伐 | 浠櫒浠〃 | 鏂頒駭涓?/a> | 涓撻 | 榪斿洖棣栭〉 |
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| 棣栭〉 | 璧勮涓績(jī) | 鍖栧伐鍟嗚錘 | 縐戝鐮旂┒ | 浜т笟鍙戝睍 | 浜烘墠浜ゆ祦 | 浼?xì)灞曚俊鎭?/a> | 瀹炵敤緗戝潃 | 緹よ嫳鑱氶 | 瀛﹁呬粙緇?/a> | 浼?xì)鍛樹(shù)腑蹇?jī) | 璁哄潧 | ||
| 濉戞枡 | 姍¤兌 | 綰ょ淮 | 娑傛枡涓庢補(bǔ)澧?/a> | 鑳剁矘鍓?/a> | 澶嶅悎鏉愭枡 | 鐭沖寲 | 鍖栧伐 | 浠櫒浠〃 | 鏂頒駭涓?/a> | 涓撻 | 榪斿洖棣栭〉 |
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榪戞棩錛屽搱灝?dāng)婊ㄥ伐涓氬ぇ瀛︺佸叞宸炲ぇ瀛︺佺編鍥藉姞宸炲ぇ瀛︽礇鏉夌煻鍒嗘牎銆佸姞宸炲ぇ瀛︿集鍏嬪埄鍒嗘牎絳夐珮鏍＄爺絀朵漢鍛樺叡鍚屽悎鎴愬嚭綾沖眰鐘剁粨鏋勭殑鍙屾洸綰跨粨鏋勯櫠鐡鋒皵鍑濊兌錛岃鏉愭枡鍙互鏋佸ぇ澧炲己浼犵粺闄剁摲姘斿嚌鑳舵潗鏂欑殑鍚勯」鎬ц兘錛屼負(fù)瑙ｅ喅闄剁摲瓚呰交緇撴瀯鐨勮剢鎬ч棶棰橈紝浠ュ強(qiáng)鍙楃儹鏋愭櫠闂鎻愪緵浜?jiǎn)鐮斀I舵濊礬錛屼績(jī)榪涗簡(jiǎn)闄剁摲姘斿嚌鑳跺湪闅旂儹銆佸偓鍖栥佽兘婧愩佺幆澧冩不鐞嗐佽埅絀鴻埅澶╃瓑棰嗗煙鐨勫簲鐢ㄣ?/span>
闄剁摲姘斿嚌鑳跺洜鍏惰秴杞匯佽愮伀銆佽愯厫铓銆佽愰珮娓╃瓑鐗規(guī)э紝闈炲父閫傚悎鐢ㄤ綔鑸┖鑸ぉ棰嗗煙鐨勯殧鐑潗鏂欙紝浣嗗叾鑴嗘с侀珮娓╂瀽鏅躲佺儹闇囧潔緙╃瓑闂?shù)弗閲嶅埗绾︿簡(jiǎn)鐩稿叧鐮斀I跺拰搴旂敤銆傛嬈″彇寰楃殑鐮旂┒鎴愭灉鍩轟簬5騫寸殑鐭沖ⅷ鐑皵鍑濊兌鍩虹鐮旂┒錛屽茍鍘嗘椂2騫村畬鎴愩傛嵁欏圭洰璐熻矗浜恒佸搱灝?dāng)婊ㄥ伐涓氬ぇ瀛﹀壇鏁欐巿寰惥様浠嬀l嶏紝欏圭洰鍓嶆湡鐨勫熀紜鐮旂┒瀹屾垚浜?jiǎn)鐭冲ⅷ鐑皵鍑濊兌鐨劖憛寮规с佽礋娉婃澗姣斻佽秴杞匯佸鐢點(diǎn)佹祦浣撹涓恒佽楄兘琛屼負(fù)絳夌爺絀跺伐浣溿傚湪姝ゅ熀紜涓婏紝鐮旂┒鍥㈤槦閲囩敤鍦ㄧ煶澧ㄧ儻姘斿嚌鑳舵ā鏉垮師浣嶆矇縐櫠鐡風(fēng)殑CVD鎶鏈紝騫墮氳繃鍔犵儹鍒昏殌妯℃澘鐨勬柟娉曪紝浣垮埗澶囩殑闄剁摲姘斿嚌鑳朵笉浣嗗叿鏈夎礋娉婃澗姣旂壒鎬э紝騫墮氳繃瀛斿鐨勨滃弻澹佲濅簹緇撴瀯錛屽悓鏃跺疄鐜頒簡(jiǎn)闄剁摲姘斿嚌鑳剁殑璐熺儹鑶ㄨ儉鐗規(guī)э紝浠庤屽寮轟簡(jiǎn)闄剁摲姘斿嚌鑳剁殑鍔涘鍙?qiáng)鐑绛夋ц兘銆?/span>
寰愮繑琛ㄧず錛岄櫠鐡鋒皵鍑濊兌CVD鐨勫埗澶囨槸鐮旂┒鐨勫叧閿備負(fù)璧嬩簣闄剁摲姘斿嚌鑳舵煍闊фэ紝鎺у埗瀛斿澹佸帤錛屾彁楂橀櫠鐡鋒皵鍑濊兌緇撴櫠鎬э紝騫跺疄鐜扮粨鏋勮璁★紝鐮旂┒浜哄憳鍘嗙粡浜?jiǎn)杩戝崈娆＄殑鍙嶅瀹為獙銆傛澶栵紝闄剁摲姘斿嚌鑳跺叿鏈夌殑瓚呰交鐗規(guī)т嬌寰楀晢鐢ㄦ祴閲忕郴緇熸棤娉曟祴璇曞叾瀵肩儹緋繪暟錛屼負(fù)姝わ紝鐮旂┒鍥㈤槦鎼緩浜?jiǎn)涓撻棬鐨剫箣閲忚畱证囧Q屽茍榪涜浜?jiǎn)鍙潬鎬ц璇佸伐浣溿?/span>