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Facile Fabrication of Nanocellular Block Copolymer Thin Films Using Supercritical Carbon Dioxide
writer:Li L, Yokoyama H, Nemoto T, Sugiyama K
keywords:LITHOGRAPHY
source:期刊

A novel, facile, and reproducible method of fabricating nanocells in thin films (see Figure) has been developed using a fluorinated block copolymer with a supercritical carbon dioxide (scCO2) soluble block as a template. The nanocells have an average spacing of 34 nm and a number density of 9 X 10(10) cm-2. The size of nanocellular structures is readily tunable by changing the saturation pressure of scCO2.